<azonenberg> Note to self - my denatured alcohol has some sort of contaminant in it
<azonenberg> Totally destroyed film quality
<azonenberg> when i used undiluted solution it worked
<bart416> heh azonenberg
<CIA-67> homecmos r113 | trunk/lithography-tests/labnotes/azonenberg_labnotes.txt | Today's lab notes
<azonenberg> gaah, it didnt work on the other side
<azonenberg> The cause of the problem is now unknown again
<azonenberg> The back side of the wafer is pretty screwed up but the front is good enough i can definitely do testing on it
<azonenberg> though a full working comb drive may prove a little difficult
<azonenberg> I'm taking that one (2 inch double-side-polish <110>) and another one (2 inch single-side-polish <110>) up to campus tuesday morning for copper/chrome plating
<azonenberg> and hopefully that night i can start lithography tests
<azonenberg> also, a quick dip in HF is very effective at removing residue from failed tantalumfilm coating runs
<azonenberg> takes the native oxide off, as well as whatever is sitting on top
<azonenberg> a full rca clean is overkill but the hf step works beautifully
<azonenberg> Still getting some pinholes in the film, not sure where the contaminant is coming from
<azonenberg> The tantalum oxide step is by far the lowest yield i have on any of my processes
<azonenberg> even though photoresist is applied on the exact same tool it's been far more cooperative
<azonenberg> makes me wonder if perhaps i should consider buying some emulsitone glass forming solution instead
<azonenberg> or using an alternate metal hardmask
<azonenberg> say, gold over chrome
<azonenberg> Gold can be etched, afaik, in HCl : H2O2 solution
<azonenberg> the obvious problem is that its expensive
<azonenberg> nickel also looks good except its hard to etch
<azonenberg> Or depsoit, for that matter
<azonenberg> The paper i'm reading suggests that koh may not attack copper/chrome much though
<azonenberg> so i want to explore using a CuCr stack as a hardmask without using any ta2o5 under it
<azonenberg> Back from campus with two freshly CrCu plated 2-inch <110> wafers
<azonenberg> Should make for a fun evening
<azonenberg> adhesion seems way better than i got before with just Cu
<azonenberg> thoguh we wont know for sure until i test
<bart416> Well, we shall see eh :D
<nathan7> azonenberg: sweet
<azonenberg> One is double side polished with Ta2O5 over the surface, the other is single side polished and bare
<azonenberg> both were plated on the polished side(s) with 5-10nm Cr and around 1000nm Cu