<
azonenberg>
So I think I have a pretty good idea of what's been causing my fab problems
<
kristianpaul>
listen
<
azonenberg>
The layer thickness in lift-off when the deposited layer is spin coated
<
azonenberg>
is somewhat dependent on photoresist thickness
<
azonenberg>
iow in small features like the 20um squares i was testing on, the hardmask pools in the holes and doesnt thin by too much when spun
<
azonenberg>
This results in a several hundred nm to nearly a micron thick hardmask which cracks during the hard bake
<
azonenberg>
Now that i've figured out a cleaning process that removes silicon particles left from scribing, i can get away with a far thinner layer
<
azonenberg>
So i'm going to dilute the photoresist with acetone and try making it thinner
<
azonenberg>
Then spin coat (diluted) hardmask over it
<
azonenberg>
Followed by lift-off in acetone
<
azonenberg>
The end result should be a much thinner tantalum chloride layer which wont crack during baking
<
kristianpaul>
are you afraid something else may crack during bake?
<
kristianpaul>
ah, okay more thinner less posible brake :-)
<
azonenberg>
There is nothing else to crack lol
<
azonenberg>
Just silicon, which doesnt mind heat
<
kristianpaul>
hehe, sorry just reading here when have time, but very interesting fnidings :)
<
azonenberg>
I feel like i'm getting close
<
azonenberg>
I'm knocking off one yield problem after another
<
azonenberg>
Oh, thinner photoresist will also expose and develop faster
<
azonenberg>
as there's less PR to react with
<
bart416>
azonenberg, would you do it; unpaid internship; agilent
<
azonenberg>
bart416: As me (PhD student with full funding) or as you (whatever your situation is)?
<
azonenberg>
Whats your situation now? Lol
<
bart416>
In 2 years I'll have a masters degree in EE
<
azonenberg>
I could see it being interesting but i suspect you might be able to find a paid position
<
bart416>
Yeah, that's the thing
<
azonenberg>
Check TI and all of the other big companies
<
bart416>
TI doesn't really have things in Europe
<
azonenberg>
i have a friend doing paid summer work at TI this summer
<
azonenberg>
And ok, europe
<
bart416>
I'm also looking into Alcatel-Lucent
<
azonenberg>
Not sure what the big companies there are - NXP, renesas?
<
bart416>
(Bell Labs)
<
bart416>
Philips used to do LCD TV R&D not too far from here but they closed it down last year
<
bart416>
Going to ask my professors about maybe something at IMEC
<
bart416>
But yeah, the thing is; eventually on your curriculum; some unknown company vs. agilent
<
bart416>
It's worth considering
<
azonenberg>
Agreed
<
azonenberg>
I just suggest you look around and try finding another big company that offers paid work
<
bart416>
Might not matter much as I'm looking into a scholarship abroad that would require me to start over but yeah
<
bart416>
But I'll know more about that at the end of the month
<
bart416>
But yeah, I'm going to try to contact somebody at Alcatel, you never know
<
bart416>
Bell Labs isn't exactly a small player either eh :P
<
bart416>
Mhhh, NXP seems to have an office in Leuven
<
bart416>
But that's rather far :(
<
bart416>
If I get up at 5:30 I'd be in Leuven by maybe 8:15
<
bart416>
I'll look into it
<
bart416>
Mhhh, they're looking for a lot of people at NXP actually in Belgium
<
bart416>
But none in the field that interests me the most :(