azonenberg changed the topic of #homecmos to: Homebrew CMOS and MEMS foundry design | Wiki: http://homecmos.drawersteak.com/wiki/Main_Page | Repository: http://code.google.com/p/homecmos/ | Logs: http://en.qi-hardware.com/homecmos-logs/
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<azonenberg> NullMoogleCable: chemical-mechanical polishing
<azonenberg> i've mostly used it at the die level for deprocessing
<azonenberg> i have not yet tried to CMP a whole wafer but it's done routinely by fabs
<Sync__> it is easy enough
<azonenberg> Sync__: the hard part is getting everything super-uniform
<azonenberg> But in this case, if you just want to strip a film
<azonenberg> and you dont care about the wafer being slightly higher on one side than the other
<azonenberg> then its a lot easier
<Sync__> well, as everything it is fiddly to set up
<Sync__> it apparently is really tricky to get wafers with two polished surfaces
<Sync__> if you don't care about braking your wafers you can just determine the preferred way of breaking them to know which orientation they are
<NullMoogleCable> so i found a interesting patent http://www.google.com/patents/US5725742
<NullMoogleCable> and it looks expired too
<Sync__> nobody will care if you do that
<Sync__> I wonder what they used it for, if at all
<NullMoogleCable> to oxidize silicon without a 1200* oven...
<Sync__> the problem is the wafer will have serious ionic contamination
<NullMoogleCable> how so?
<Sync__> the electrolyte contains sodium
<NullMoogleCable> what would be the effects of said contamination?
<Sync__> bad lifetime, meaning slow transistors
<Sync__> I'd just shove them through rto
<NullMoogleCable> rto?
<Sync__> rapid thermal oxidation
<NullMoogleCable> I dont have a oven... yet
<Sync__> just get a small glazing oven
<NullMoogleCable> how much do thoes run?
<Sync__> no idea
<Sync__> new I guess around 300, used probably around 50-100
<azonenberg> sodium? run away
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